供應美國等離子去膠清洗機(美國PE公司)，產品性價比極高，操作簡單，
工藝穩定性好。針對不同的工藝尺寸，分為三個型號。
型號一： PE50 用于4英寸工藝
Remarks:
n Vacuum Chamber, Aluminum, Rectangle, 6”*6”*4”
n Electrode Configuration, Silngle 5”*5” Horizontal
n RF Generator & Matching Network 125W,
50KHz
n 1~2 Gas channels W/Precision Needle Valve
Flow
Control, 0~25 CC/min
n Vacuum Gauge, 0~1Torr
n Vacuum Pump, 5 CFM, Oxyger Service
n Process Sequence, Single
n
AC Input 120V, 50Hz, 15A
型號二：PE100 用于8英寸工藝
Remarks:
n Vacuum Chamber, Aluminum, Rectangle, 12”*12”*12”
n Electrode Configuration, Three 9”*9” Horizontal
n RF Generator & Matching Network 300W,
13.56MHz
n 1~2 Gas channels W/Precision Needle Valve
Flow
Control, 0~50 CC/min
n Vacuum Gauge, 0~1Torr
n
Vacuum Pump, 8 CFM,
Oxyger Service
型號三：PE200 用于12英寸工藝
Remarks:
n Vacuum Chamber, Aluminum, Rectangle, 17”*14”*14”
n Electrode Configuration, Three 13”*13” Horizontal
n RF Generator & Matching Network 300W,
13.56MHz
n 1~2 Gas channels W/Precision Needle Valve
Flow
Control, 0~200 CC/min
n Vacuum Gauge, 0~1Torr
n Vacuum Pump, 29 CFM, Oxyger Service
如您需要小規模生產型的去膠機，請直接致電我公司，我們會推薦更合適
的型號并報價給您。